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摘要翻译：
具有尖锐颗粒的脆性材料的爆破是许多工业过程中的一项重要制造技术。特别是对于微系统，它允许生产特征尺寸小到几十微米的器件。该工艺的一个重要参数是爆破后表面的表面粗糙度。本文研究了氧化铝粒子轰击Pyrex玻璃和硅表面后的结垢特性。用平均尺寸分别为$29μm和$9μm的氧化铝颗粒在正常入射下轰击目标。研究表明，所得表面具有多重分形性质。应用多重分形消去涨落分析(MFDFA)可以确定曲面的奇异性谱。这种光谱不依赖于目标材料或粒子的大小。确定了量化相关量的几个参数。我们认为，对于小于5μm的尺度，断裂过程占主导地位，而在大尺度上，长程关联是多重分形行为的主要原因。
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英文标题：
《Scaling properties of pyrex and silicon surfaces blasted with sharp
particles》
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作者：
Z. Moktadir, H. Wensink and M. Kraft
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最新提交年份：
2007
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分类信息：
一级分类：Physics 物理学
二级分类：Statistical Mechanics 统计力学
分类描述：Phase transitions, thermodynamics, field theory, non-equilibrium phenomena, renormalization group and scaling, integrable models, turbulence
相变，热力学，场论，非平衡现象，重整化群和标度，可积模型，湍流
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英文摘要：
The blasting of brittle materials with sharp particles is an important fabrication technology in many industrial processes. In particular, for micro-systems, it allows the production of devices with feature sizes down to few tens of microns. An important parameter of this process is the surface roughness of post-blasted surfaces. In this work the scaling properties of Pyrex glass and silicon surfaces after bombardment with alumina particles is investigated. The targets were bombarded at normal incidence using alumina particles with two different average sizes, $29\mu m$ and $9\mu m$, respectively. This investigation indicates that the resulting surfaces have multifractal properties. Applying multifractal detrended fluctuation analysis (MFDFA) allowed us to determine the singularity spectrum of the surfaces. This spectrum did not depend on the target material or on the size of the particles. Several parameters quantifying relevant quantities were determined. We argue that for scales below $5 \mu m$, fracture processes are dominant while at large scales long range correlations are responsible for the multifractal behaviour.
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PDF链接：
https://arxiv.org/pdf/704.3546
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